>SC1: MEMS Sensors and Actuators

SC1 title

MEMS, Sensors and Actuators

SC1 Duration

09.00-17.00. Refreshment Breaks mid-morning, lunch, mid-afternoon.

SC1 instructor

Prof. Gabor Harsanyi, Budapest University of Technology and Economics, Department of Electronics Technology, Budapest, Hungary

SC1 instructor credentials


Prof Gabor Harsanyi graduated in electrical engineering from the Budapest University of Technology and Economics in 1981 and received doctorate (dr. univ) in Electronics Technology from the same university in 1984. Thereafter, he moved to the Microelectronics Company (MEV, Hungary) where he developed his expertise in hybrid integrated circuits and sensors. In 1992, he received his Ph.D. from the Hungarian Academy of Sciences. Since 1984, he has been a member of the research and teaching staff of the Department of Electronics Technology, Budapest University of Technology and Economics in various positions, and became the head of department in 2003. His main research topics are: reliability physics of high density electronic interconnection systems, sensors in biomedical applications. Hi published two books: “Polymer Films in Sensor Applications”, and “Sensors in Biomedical Applications”, which became part of the basic literature in sensors. Dr Harsanyi conducted a large number of scientific and industrial research and development projects, published more than 250 papers and has more than 1500 citations. He was a regular tutor of short courses organized by IMAPS, IEEE and Europractice. He was also member of the Technical Program Committee of IMAPS-Europe for several years and receiver the IMAPS Fellowship Award in 1998.

SC1 objective


This course will outline the basic technologies, structures and operation principles of various sensor and actuator (optoelectronic and passive) components applying MEMS (micro-electro-mechanical system) approaches. The device technologies gradually shifted from the hybrid integration applying beside semiconductors also ceramics, polymers, thick and thin films to single chip or stacked multichip MEMS structures that have small sizes, smaller consumption and can be integrated with smart functions. The large production scale and low cost of semiconductor based MEMS devices resulted in their widespread application not only in special fields like automotive and aerospace, but also in biomedical and consumer areas. The course will highlight the basic technology approaches, the possible mechanical elements that can be integrated with electrical circuit functions, gives a survey of examples from the practically realized structures, and their application possibilities are also discussed.

SC1 outline


·         Basic MEMS Technology Approaches: bulk micromachining and surface micromachining, wafer stacking and back


·         3D MEMS Structures: trenches, cavities, micro-channels, membrane, bridge, cantilever, suspended parts, spring, 

          cog-wheel, interdigital structure

·         MEMS Sensors: mechanical sensors, thermal sensors, chemical sensors, bosensors:

·         MEMS Actuators: electrostatically land piezoelectrically driven types

·         MEMS in Optoelectronics and Passive components

·         Applications: biomedical, automotive, informatics and telecommunication, aerospace, consumer

SC1 target audience

The course is designed for application designers and developers, MEMS developers as well as system development and manufacturing engineers to understand the operation principles and development trends of MEMS devices and to understand the direction for future requirements. Also newcomers are welcome since the course uses a description that can be understood easily.